发明名称 CVD of metals using iodide precursor
摘要 <p>The present invention discloses a CVD (Chemical Vapor Deposition) process where nickel or alloys thereof, such as, Ni/Cu, Ni/Co, are deposited on metal surfaces (32, 34) which are capable of receiving nickel or alloys thereof, using an Iodide source (23), preferably an Iodide salt, such as, Copper Iodide. <IMAGE></p>
申请公布号 EP0814175(A2) 申请公布日期 1997.12.29
申请号 EP19970304018 申请日期 1997.06.10
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 REDDY, SRINIVASA S.N.;KNICKERBOCKER, JOHN ULRICH;WALL, DONALD RENE
分类号 C23C16/08;C23C16/44;H01L21/28;H01L21/285;H05K3/24;(IPC1-7):C23C16/08 主分类号 C23C16/08
代理机构 代理人
主权项
地址