| 摘要 |
The device includes a laser which generates a light beam transmitted through a microscope objective towards the surface of a sample. The reflected beam is transmitted through the objective, reflected by a beam splitter (S2) and focused in a point A3. When the microscope is aligned the point A3 is in a plane normal to the optical axis of the system. A detector (D) determines the position of the point A3 relative to that of the plane. It also triggers the microscope alignment when the point is not in the plane.
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