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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND METHOD FOR FORMING IT IN CHIP
摘要
申请公布号
JPH09330963(A)
申请公布日期
1997.12.22
申请号
JP19960152026
申请日期
1996.06.13
申请人
NEC ENG LTD
发明人
KAYANO MINORU
分类号
G01R31/26;G01R1/06;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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