ELECTRON EMITTING ELEMENT, ELECTRON SOURCE AND IMAGE FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electron emitting element as an electron beam source which can realize an image forming device of high quality. SOLUTION: In an electron emitting element provided with a conductive film 4 having an electron emitting part between element electrodes 2, 3 on a substrate 1, the conductive film 4 comprises Ni and Ni oxide, Ni in this Ni oxide is set to 5 atomic % or more 90 atomic % or less of total Ni of the conductive film 4. In this way, an electron emitting part making a set of shape can be formed by low power, dispersion of a characteristic in each element can be reduced.