发明名称 |
BOITE DE STOCKAGE D'UN OBJET DESTINE A ETRE PROTEGE D'UNE CONTAMINATION PHYSICO-CHIMIQUE |
摘要 |
<p>The invention relates to a storage box for an object that is to be protected from physicochemical contamination. The storage box is intended to have low weight, good mechanical strength, a good electrical condition, with a low degassing rate in time with prevention of diffusion of gasses from the external atmosphere into the interior of the box. The inner and/or outer surface of the box's walls are coated with at least one protective layer. The box may be used to store silicon wafers.</p> |
申请公布号 |
FR2741328(B1) |
申请公布日期 |
1997.12.19 |
申请号 |
FR19950013720 |
申请日期 |
1995.11.20 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
SPINELLI PHILIPPE;DOCHE CLAUDE;ROSTAING JEAN CHRISTOPHE;COEURET FRANCOIS;SCOTTO D APOLONIA SYLVAIN |
分类号 |
B65D85/86;H01L21/673;(IPC1-7):B65D81/24;C23C16/30;C23C16/44;B65D81/20 |
主分类号 |
B65D85/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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