| 摘要 |
PROBLEM TO BE SOLVED: To provide a picture inspecting method and a device applying the method, by which a picture inspection can be performed by reliably correcting positional deviation a short time with respect to wide inspecting conditions and inspecting object. SOLUTION: As a method for evaluating the coincidence between a line segment of a reference picture and that on an inspecting objective picture, a correlation coefficient, the sum of the absolute values of differences and the sum of the square value of differences are used. An area for evaluating coincidence between a line segment on the reference picture and that on an inspecting objective picture is an area of a prescribed width with a line segment of maximum coincident in a center, which is obtained by last evaluation. In addition, the position of at least a line segment referred to in order to evaluate the coincidence of a line segment in a direction to be processed first is corrected based on the positional deviation quantity of a direction orthogonal to that of last time. In addition, in a method respectively calculating the positional deviation quantity by the combination of plural line segments and making its intermediate value a final positional deviation quantity, a positional deviation quantity. |
