Cantilever chip for atomic force microscopy

摘要

The cantilever chip has a cantilever spring blade provided at its end with a diamond point, which is directly applied to the spring blade via a plasma deposition process. The spring blade may be provided with a diamond layer for modifying its mechanical characteristics. The diamond point and/or the cantilever spring blade may be doped for modifying its electrical characteristics, to allow the simultaneous measurement of the topography and the electrical surface characteristics.