发明名称 Flip-Chip Semiconductor device with test structure and method of manufacturing the same
摘要 A semiconductor device has a plurality of input/output terminals (102) formed on the inner region (1a) on a semiconductor substrate (1), and a plurality of die testing terminals (101) formed on the peripheral region (1b) on the semiconductor substrate, and the input/output terminals (102) and the die testing terminals (101) are connected to each other by a metal wiring layer (103). Die testing is performed by bringing probes projecting from a probe card into contact with the plurality of die testing terminals (101). <IMAGE>
申请公布号 EP0813238(A2) 申请公布日期 1997.12.17
申请号 EP19970109575 申请日期 1997.06.12
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 YOSHIDA, AKITO
分类号 H01L21/66;H01L21/60;H01L23/58 主分类号 H01L21/66
代理机构 代理人
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