| 摘要 |
PROBLEM TO BE SOLVED: To perform correction polishing of a surface plate to be polished effectively without necessitating high-degree design and precise machining by positioning a small wheel having no tooth at a place of substantially maximum interval between a correction polishing ring and a sun gear in a condition in which the small wheel is in contact with the inner periphery of the correction polishing ring and the sun gear. SOLUTION: In a lapping machine, an upper surface plate 22 is removed temporarily to separate a carrier gear, and instead, a correction polishing ring 37 of which outside diameter is smaller than inside diameter of an internal tooth gear 7 and which is provided with teeth on outer periphery of a ringlike body is put on a lower surface plate 14 on an inside of the internal tooth gear 7. Next, a disclike small wheel 38 having no tooth is put on the lower surface plate 14 at a place of the maximum interval between the correction ring 37 and a sun gear 19 in a condition in which the small wheel 38 is in contact with inner periphery of the correction ring 37 and the sun gear 19, respectively. When the internal tooth gear 7 and the sun gear 19 are rotated in this condition, the correction ring 37 to which rotation is transmitted from the internal tooth gear 7 rotates by itself to perform correction-polishing of polishing face of the upper and lower surface plates 22, 14. |
