| 摘要 |
<p>PROBLEM TO BE SOLVED: To make a sensor compact and light-weight and realize a high sensitivity by forming a detection electrode and a feedback electrode in such a manner that they are line-symmetrical against X and Y axes. SOLUTION: The detection axes for biaxial rotary angular velocity of four detection electrodes 34 common to exciting electrode are set respectively to X axis and Y axis. The electrodes 34 are formed line-symmetrical against the X and Y axes without difference of detection sensitivity on the X and Y axes. Four feedback electrodes 35 are also formed line-symmetrical against the X and Y axes with an inclination of 45 degrees. Further, the electrodes 35 are formed inside the node part of bending vibration generating when a vibrator is excited and on the outer periphery of a piezoelectric element. When an angular velocity works on an angular velocity sensor, a weight body is moved by Corioli's force and the sensor is deformed, thereby generating a charge on the electrodes 34 common to exciting electrodes. The direction and intensity of angular velocity can be detected according to the quantity of charge generating in the electrodes 34.</p> |
