发明名称 |
Deformable mirror device and manufacturing method thereof |
摘要 |
A deformable mirror device and a manufacturing method thereof, which decreases the possibility of damage to a substrate having an address scanning circuit and increases the efficiency of light reflection of a moving mirror. First and second moving mirrors and first and second posts are fabricated on a substrate. An address scanning circuit (SRAM) is fabricated on another substrate, independently. Finally, both the substrates are combined. The second post is vertically formed by sputtering after the second moving mirror is formed. |
申请公布号 |
US5699181(A) |
申请公布日期 |
1997.12.16 |
申请号 |
US19960637601 |
申请日期 |
1996.04.25 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
CHOI, BUM-KYOO |
分类号 |
G02F1/015;B81B3/00;G02B5/08;G02B26/08;H04N5/74;(IPC1-7):G02B26/00 |
主分类号 |
G02F1/015 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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