| 摘要 |
PROBLEM TO BE SOLVED: To suppress an occurrence of a cross-talk by providing at least a part of a deformed part around a depression which becomes a liquid chamber, making the deformed part form the frame of the liquid chamber based on joining and deformation with the first member when the first member and the second member are joined together, and making the deformation strength partially different. SOLUTION: The frame of a liquid chamber is made by surrounding a depression 3 which becomes a liquid chamber with members 71, 72, 73, joining the tops of the members 71, 72, 73 with the surface of a substrate when a top board 2 is joined with the substrate and deforming by compression with spring force. As the members 71, 72, 73 are made protrusive to make easy deformation and close contact and linear in shape when projected from the Z direction, a partial deformation can be controlled easily when the top board is joined. Individual protruding members are depressed by about 0.5μm due to load when the top board is joined, parts E, F, G contact the substrate tightly due to compression deformation. On the other hand, at points B, C, strength improves as compared with E, F, G. In other words, the frame of the liquid chamber is deformation resistant locally.
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