| 摘要 |
PROBLEM TO BE SOLVED: To plot a pattern in a high precision by allying a suitable scaling correcting treatment to the dimensional variation of an individual plotting body, in a laser beam plotting device having scaling correcting function. SOLUTION: A system control circuit 78 and a scaling correcting control circuit 84 are connected with an X-table positional control circuit 99 of an auxiliary scanning control circuit 88. Further, a servo motor 98 for shifting the X-table to the X-direction, i.e., to the auxiliary scanning direction at a prescribed pitch, is connected with this X-table positional control circuit 99. At the time of outputting a driving control pulse to the X-table positional control circuit 99 from an auxiliary scanning directional scaling correcting treatment circuit in the scaling correcting control circuit 84, a driving command signal is outputted in the driving circuit built-in the servo motor 98 from this circuit 99. By this constitution, the servo motor 98 is driven based on a clock pulse, i.e., a driving control pulse outputted from the X-table positional control circuit 99. Then, the plotting table is shifted at the prescribed pitch to the auxiliary scanning direction. |
