| 摘要 |
PROBLEM TO BE SOLVED: To get enough detection luminous energy by constituting a fifth region of a region where both the first region of the first reference mark and the third region of the second reference mark are made, in condition that the first reference mark and the second reference mark where transmissive regions and reflective regions are arranged alternately at pitches different to each other are laid on top of the other. SOLUTION: At the first mark c, the regions where both of the transmissive regions of two reference marks a and b are existent in condition that a 6μm-pitch mark and a 8μm-pitch mark b are laid on top of the other are made transmissive regions and the residual regions are made reflective regions. Moreover, the second mark d is a mark being made by exchanging the reflective regions and the transmissive regions of the first mark c. At the third mark e, the regions where transmissive regions on either one side exist out of the transmissive regions of the two reference marks a and b are made transmissive regions and the residual regions are made reflective regions. Moreover, the fourth mark f is a mark being made by exchanging the reflective regions and the transmissive regions of the third mark e. At the first mark to the fourth mark, detective luminous energy approximately a quarter as high as the reference mark is obtained. |
