发明名称 PHOTOSENSITIVE COMPOSITION
摘要 PROBLEM TO BE SOLVED: To prevent deactivation and form a good pattern by containing one kind of aliphatic amine and aliphatic amine salt in a photosensitive composition containing a photosensitive compound. SOLUTION: At least one kind of aliphatic amine and aliphatic amine salt is contained in a photosensitive composition containing at least one kind of a photosensitive compound at the quantity of 1wt.% or below in the form of a simgle substance or a mixture. A necessary and sufficient effect can be obtained when the quantity of 1wt.%, preferably 0.01wt.%-1wt.%, is contained. 2-mino-cyclohexanol hydrochloride, 2-amino-2-methyl-1, 3-propanediol, 2-amino-2- ethyl-1,3-propanediol, or 6-amino-2-ethyl-1-hexanol can be preferably used as the aliphatic amine.
申请公布号 JPH09325496(A) 申请公布日期 1997.12.16
申请号 JP19960141897 申请日期 1996.06.04
申请人 SONY CORP 发明人 TO YOICHI
分类号 G03F7/004;G03F7/039;H01L21/027;(IPC1-7):G03F7/039 主分类号 G03F7/004
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