| 摘要 |
PROBLEM TO BE SOLVED: To automatically detect a surface defect with high precision by forming the bright/dark pattern of light on a sample surface with a lighting means having a portal shape and an imaging device, detecting a defect on the sample surface, and judging whether it is a true defect or not with a defect judging means. SOLUTION: A lighting means 1 has a portal shape suitable for front profile in moving direction of a body 5, and projects a specified bright/dark pattern on a sample surface. A CCD camera 3 attached at a specified position of an imaging device fixing means 2 provided, side by side, to the lighting means 1 images the sample surface on which the bright/dark pattern is projected. Then the body 5 is allowed to pass the lighting means 1 and the inside of a portal shape of the imaging device fixing means 2, and at an inspection processing means 4, based on the photodetected image obtained with the camera 3, whether it is a true defect or a pseudo defect such as a hole, dirt, etc., is judged with a defect judging means 45, from the defect detection result obtained by inspection. |
