| 摘要 |
<p>A spin-split scanning electron microscope (202) includes a spin-split electron beam splitter (226) that splits the flying stream of electrons generated by an electron beam source (224) into first and second electron beams (216, 218) having different trajectories, an electron beam intensity detector (222) that receives a reflected portion of the first and second electron beams (216, 218) from distinct positions of a target surface (110) and generates an intensity signal indicative of the received beams combined intensity; and a controller (204) that receives the intensity signal and analyzes changes in the intensity signal to determine relative changes in path lengths of the first and second electron beams (216, 218). The beam splitter (226) includes a magnetic field generator that generates a non-uniform magnetic field in region of space intercepted by flying steam of electrons which causes electrons having opposite magnetic moments to be reflected into two separate electron beams.</p> |
