Method and apparatus for enhancing the efficiency of radiant energy sources used in rapid thermal processing of substrates by energy reflection

摘要

A rapid thermal heating system which includes a plurality of radiant energy sources (39) to irradiate a predetermined area of a substrate (81). The radiant energy sources are associated with reflectors (159) wherein portions of radiated areas of adjacent radiant energy sources overlap. The reflectors include a flared specular surface (160) at their light emitting end or outlet. The flared specular surface reflects radiant energy toward the substrate. <IMAGE> <IMAGE>