发明名称
摘要 <p>PURPOSE:To prevent the part where a cassette is mounted from protruding outside an equipment, and obtain a compact and smart equipment, by arranging a cassette region, an awaiting region, a chuck region and a cleaning region, at positions turning to the vertexes of a square. CONSTITUTION:A cassette region 1 is arranged at the front side right corner part on the upper surface of an equipment. An awaiting region 2 is positioned in the just rear of the cassette region 1 and arranged at the rear side right corner part on the upper surface of the equipment. A chuck region 4 is positioned at a left part adjacent to the cassette region 1 and arranged in the almost central part on the front side of the upper surface of the equipment. A cleaning region 9 is positioned in the just rear of the chuck region 4 and arranged adjacently on the left of the awaiting region 2. In the above manner, the cassette region 1, the awaiting region 2, the chuck region 4 and the cleaning region 9 are arranged at the respective positions turning to the vertexes on the upper surface of the equipment, so that the cassette region and the like do not protrude from the side part of the equipment, which is made compact and smart.</p>
申请公布号 JP2688623(B2) 申请公布日期 1997.12.10
申请号 JP19920143630 申请日期 1992.05.11
申请人 发明人
分类号 H01L21/677;H01L21/301;H01L21/68;H01L21/78;(IPC1-7):H01L21/301 主分类号 H01L21/677
代理机构 代理人
主权项
地址