VACUUM DEPOSITION SYSTEM,申请号JP19960129504-传众专利搜索

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发明名称	VACUUM DEPOSITION SYSTEM
摘要
申请公布号	JPH09316641(A)	申请公布日期	1997.12.09
申请号	JP19960129504	申请日期	1996.05.24
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	ATAKA KAZUHIDE;INABA JUNICHI;SHIMONO KAZUYUKI;SHIMAZAKI TOMOAKI
分类号	C23C14/56;(IPC1-7):C23C14/56	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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