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发明名称
ELECTRIC POWER UNIT OF TURBO-MOLECULAR PUMP
摘要
申请公布号
JPH09317687(A)
申请公布日期
1997.12.09
申请号
JP19960136354
申请日期
1996.05.30
申请人
SHIMADZU CORP
发明人
ASHIDA OSAMU
分类号
F04D15/00;F04D19/04;(IPC1-7):F04D19/04
主分类号
F04D15/00
代理机构
代理人
主权项
地址
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