| 摘要 |
<p>PURPOSE:To cancel electrostatic charge accumulated on a chip, to eliminate charge during inspection measurement, and to enable accurate inspection measurement by providing a section for holding the chip with two members, for electrifying the chip positively and the other for electrifying it negatively. CONSTITUTION:A holding section 17 is provided with an O-ring of silicone rubber which charges a chip 4 positively when the ring comes into contact with the chip 4 and slides. Holding sections 18a, 18b are provided with an O-ring of nitrile butadiene rubber which charges the chip 4 negatively. A holding section 17 attracts and holds the chip 4 on a tray 5, and transfers it onto a prealignment stage 11. A holding section 18a attracts and holds the chip 4 on the stage 11 and transfers it onto a measurement stage 19. Positive charge generated at the holding section 17 is thereby canceled by negative charge generated at the holding section 18a; the charge amount of the chip 4 on the stage 19 becomes zero. Accurate inspection measurement can be carried out without being affected by charge.</p> |
