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发明名称
ELECTRON BEAM CONTROLLING APPARATUS AND SCANNING ELECTRON MICROSCOPE USING THEREOF
摘要
申请公布号
JPH09312141(A)
申请公布日期
1997.12.02
申请号
JP19960150360
申请日期
1996.05.22
申请人
NIKON CORP
发明人
OMORI KAORU
分类号
H01J37/147;(IPC1-7):H01J37/147
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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