| 摘要 |
PROBLEM TO BE SOLVED: To obtain a radiation sensitive resin compsn. effectively sensitive to various radial rays, excellent in focus latitude and developability, almost independent of standing wave and having improved balance of characteristics including sensitivity, resolution, pattern shape and heat resistance by incorporating a specified copolymer, a radiation sensitive acid generating agent and an acid diffusion controlling agent. SOLUTION: This radiation sensitive resin compsn. contains a copolymer contg. repeating units represented by formulae I-III, a radiation sensitive acid generating agent and an acid diffusion controlling agent. In the formulae I-III, each of R1 , R2 and R7 is H or methyl, each of R3 and R4 is H or 1-5C alkyl, R5 is 1-6C alkylene or 2-4C alkylidene, R6 is 1-10C chain alkyl, etc., and (n) is an integer of 0-4. A resist especially excellent in focus latitude and developability, almost independent of standing wave and excellent in balance of characteristics including sensitivity, resolution, pattern shape and heat resistance is obtd. |
