VACUUM MICRODEVICE AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a vacuum microdevice of structure having a sharpened tip end of a protruding shaped electrode radiating a current and a method of manufacturing this vacuum miciodevice. SOLUTION: In a hole of a silicon substrate, a mold layer 10 of shape thinning in accordance with going to a tip end is formed by deposition of particles, and an opening hole, having a shape sharpening the depth of the hole, is made. In this hole, an emitter electrode 11 is buried, and, after connecting it to a structural substrate 15, by separating the silicon substrate, the protruded shape emitter electrode 11 having a sharp tip end can be obtained on the structural substrate 11.