| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of a field emission type cold cathode by which a stable high emission current can be generated by cleaning a cathode surface by using low temperature heat treatment allowable by a constitutive material. SOLUTION: After an insulating layer 12 and a gate electrode layer 13 are formed on a conductive layer 11, an opening part 14 is formed, and the conductive layer is partially exposed. An Mo cathode 15 is formed on the exposed conductive layer. Afterwards, an MoO3 oxide film 16 is immediately formed on a surface of the Mo cathode. Since the MoO3 oxide film can be removed at a comparatively low temperature in a vacuum, it can be removed by a degassing process when this element is mounted on a prescribed device.</p> |
