SILICON ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a silicon acceleration sensor which enables judging for detecting acceleration only from the disconnection of a bridge circuit in a trouble shooting for the rapture of a beam-shaped structure part by suppressing the worsening of the characteristic in the silicon acceleration sensor attributed to the stress of a wire. SOLUTION: In the silicon acceleration sensor which is provided with a mass part 2 formed on a silicon substrate 1, a frame part 3 surrounding it and piezo-electric resistances R1 -R4 interconnected through beam-shaped structure parts 4 to be formed at a part of the area of the beam-shaped structure parts 4, an input acceleration is detected by changes in the resistance values of the piezo-electric resistance parts. The piezo-electric resistance parts R1 -R4 employ U-shaped piezo-electric resistance parts. The U-shaped parts of the piezo-electric resistance parts R1 -R4 are formed in the beam-shaped structure parts 4 and the connection parts of the piezo-electric resistance parts on the frame part 3.