| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser device wherein laser beam forming strength distribution of a single transverse mode can be obtained when preliminary ionization is carried out by a corona electrode. SOLUTION: This gas laser device is provided with a laser tube 1 wherein gas laser medium is sealed, a pair of main electrodes consisting of a cathode 21 and an anode 3 arranged in opposition inside the laser tube, a power supply 8 which ignites main discharge in a discharge space part 12 between a pair of main electrodes by applying a high voltage to the main electrode and corona electrodes 51a, 51b which are provided on a surface of one main electrode opposite to the other main electrode and preliminarily ionizes a discharge space part before main discharge. A corona electrode is provided to be all over almost a total length in a longitudinal direction of one main electrode and be almost uniform when preliminary ionization strength in a width direction is averaged all over almost a total length in a longitudinal direction. |
