| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope which keeps a probe from coming into contact with a sample when the sample is moved by a stage. SOLUTION: A stage 16 is provided on a base 12 to place a sample 24 thereon. An arch 14 is fixed on the base 12 and an optical microscope part 30 and a probe unit 40 are arranged at the central part thereof to be both vertically movable together. The probe unit 40 has a cantilever 42 with a probe 44 at the free end thereof and a scanner 46 for three-dimensionally scanning it. The optical axis of an objective lens 32 and the axis of the probe 44 are positioned as spaced at an interval D. This apparatus has an optical microscope part 30 and a position sensor 50 to detect a specified vertical positional relationship of the probe unit 40. In this positional relationship, for example, the tip of the probe and the surface of the sample are placed at a specified interval (normally, several tensμm) when the optical microscope part 30 is focused.
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