DEVICE AND METHOD FOR COATING DISK-TYPE SUBSTRATES OR DATA MEDIA

摘要

In a device for coating disk-type substrates (1) used in a data-storage technology or data media, which has a rotatable substrate holder (3) with a central holding element (2) for positioning the substrate, a non-contact rotary drive is provided. The substrate on the rotatable substrate holder is swivelled into a stationary position of the coating facility, for example by a rotary table (4), and is then coupled without delay to a high-speed drive (5), by means of a non-contact magnetic coupling (6), the substrate being rotated in a well-defined manner. At the same time, the liquid coating material is applied with several applicator nozzles, while a spin-off catcher (8) is lowered over the substrate to carry away the excess coating material. Once the substrate is coated uniformly, its rotation is slowed, and the spin-off catcher begins to lift while rotation is still going on, to allow the substrate to swivel away.