ELECTROFORMED MULTILAYER FLOW REGULATOR INCORPORATING FORCE-GENERATING MEANS FOR SELECTIVELY CONSTRICTING THE FLUID FLOW PATH, AND A PROCESS FOR THE PREARATION THEREOF

摘要

A zero sack volume fluid flow regulator generates upstream turbulence for control of fluid flow, fluid spray distribution and fluid droplet size. The fluid flow regulator includes a seal layer (5) for selectively controlling fluid flow. The seal layer (5) is resiliently movable relative to a base layer (3) to selectively constrict a turbulence inducing intermediate channel (10) within the regulator and selectively control fluid flow. A method of fabricating the fluid flow regulator utilizes a multilayer resist process in conjunction with a multilayer electroforming process.