发明名称 FABRICATION METHOD OF MOSFET
摘要 A transistor forming method of a semiconductor device forms a gate electrode by using a silicon layer, obtains a gate electrode smaller than a threshold value of a gate electrode mask, and achieves a high-integration of the semiconductor device.
申请公布号 KR0122318(B1) 申请公布日期 1997.11.26
申请号 KR19930029818 申请日期 1993.12.27
申请人 HYUNDAI ELECTRONICS IND.CO.,LTD 发明人 PARK, SANG-HOON
分类号 H01L21/336;(IPC1-7):H01L21/336 主分类号 H01L21/336
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