Synchrotron Radiation Exposure Apparatus,申请号EP19910302047-传众专利搜索

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发明名称	Synchrotron Radiation Exposure Apparatus
摘要
申请公布号	EP0447175(B1)	申请公布日期	1997.11.19
申请号	EP19910302047	申请日期	1991.03.12
申请人	CANON KABUSHIKI KAISHA	发明人	IWAMOTO, KAZUNORI;MIZUSAWA, NOBUTOSHI;KARIYA, TAKAO;UZAWA, SHUNICHI;EBINUMA, RYUICHI
分类号	G03F7/20;G21K1/02;H01L21/027;(IPC1-7):G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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