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发明名称
ROTATIVE TREATING APPARATUS
摘要
申请公布号
JPH09296984(A)
申请公布日期
1997.11.18
申请号
JP19960132845
申请日期
1996.04.30
申请人
SHIMADA PHYS & CHEM IND CO LTD
发明人
SHIMADA KIYOSHI
分类号
F26B5/08;F26B11/18;H01L21/304;(IPC1-7):F26B5/08
主分类号
F26B5/08
代理机构
代理人
主权项
地址
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