| 摘要 |
<p>PROBLEM TO BE SOLVED: To correct the flatness of a substrate to be exposed on a holder, without increasing the cost of the apparatus. SOLUTION: An exposure light emitting end 10 for exposing a plate 7 is disposed above this plate to be laid on a plate holder 1. The lower end of this emitting end 10 is surrounded with a partition 6 and a nozzle 5 is mounted on the partition and connected to a compression air source 3 through a piping 4. At exposure, compressed air is jetted from the nozzle 5 in a space defined by the partition 6 to jet the compressed air from the lower end of the partition 6 on the plate 7, thereby pressing the plate 7 to the holder to correct the flatness of the plate 7 in the range surrounded by the partition 6.</p> |
