Turbomolecular pump

摘要

A turbomolecular pump comprises a pump body housing a gas inlet and a gas exhaust port and a plurality of pumping assemblies with interleaved rotors and stators located within the pump body. The rotors are secured to a rotating shaft that is supported by at least one rotatable support and driven by a motor. At least one stator of the pumping assemblies is provided with at least one spiral channel adapted to push and eject the gases from an area proximal to the shaft toward an area distal from the shaft and vice versa.