| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser in which the life of electrodes for preliminary ionization is increased and the reliability of a laser tube is improved and the life of the laser tube is increased by reducing the contamination in the laser tube. SOLUTION: A gas laser excites gas to generate laser light by discharge between a pair of main discharge electrodes. Prior to the discharge between a pair of main discharge electrodes 2 and 3, a pulse high voltage is applied to fine lines 11 which are insulated and strung in proximity of the main discharge electrodes 3 to generate pulse streamer discharge. Ultraviolet rays generated by discharge are applied to gas between the main discharge electrodes 2 and 3 to cause preliminary ionization of the gas. |
