Differential pressure sensor with stress reducing pressure balancing means

摘要

The present invention relates generally to a pressure sensor and, more specifically, to a pressure equalization structure that balances the forces on the pressure sensitive component in order to reduce the stress that could otherwise be imposed on its piezoresistors. The pressure sensor provides a housing in which a cavity is formed. Within the cavity, a pressure sensitive component is disposed between a first seal and a second seal in order to expose a first surface of the pressure sensitive component to a first conduit and a second surface of the pressure sensitive component to a second conduit. The pressure surrounding the pressure sensitive structure is generally equalized to one of the first and second conduits by providing a bypass conduit connected therebetween.