发明名称 Vertical precharge structure for DRAM
摘要 A DRAM one device cell and an associated precharge circuit are integrated together in a novel structure having an area of only four square features. The structure also provides physical and electrical separation between adjacent cells along a direction parallel to the DRAM word lines. The DRAM bit line length per bit is reduced by 50% relative to a conventional planar integrated structure disclosed elsewhere. As a result, bit line capacitance is also substantially reduced, and the effectiveness of a precharge technique for reduction of DRAM power consumption is enhanced by the dense novel structure.
申请公布号 US5684313(A) 申请公布日期 1997.11.04
申请号 US19960603832 申请日期 1996.02.20
申请人 KENNEY, DONALD M. 发明人 KENNEY, DONALD M.
分类号 H01L27/108;(IPC1-7):H01L27/108;H01L29/76;H01L29/94;H01L31/119 主分类号 H01L27/108
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