Procedure for preparing thin films of modified lead titanate.

摘要

Procedure for preparing thin films of modified lead titanate. Procedure for preparing precursor solutions with compositions based on modified lead titanate, used for the deposition of thin ferroelectric films. For preparing the solutions: carry out the synthesis of a lead and titanium gel, via a sol-gel route based on the use of modified alkoxides of titanium and diols such as solvents. This gel has the property of being rehydrated in excess of water, on incorporating the modifying ion into the system in the form of aqueous solution of any of its salts. Thus, stable hydro-alcoholic precursor solutions of modified lead titanate are obtained. This process simplifies and facilitates the manufacture of thin ferroelectric films of modified lead titanate from solutions, as well as their integration with the semiconductor materials used in devices for microelectronics. <IMAGE>