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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09283534(A)
申请公布日期
1997.10.31
申请号
JP19960094408
申请日期
1996.04.16
申请人
OKI ELECTRIC IND CO LTD
发明人
UMETANI MASATO
分类号
H01L29/73;H01L21/331;H01L21/822;H01L27/04;H01L27/06;H01L29/732;(IPC1-7):H01L21/331
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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