发明名称 EXPOSURE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an exposure device capable of mitigating the exchange work of upper masks. SOLUTION: The exposure device is constituted of a loader 1, an exposure part 2 and an unloader 3. The exposure part 2 is provided with an upper printing frame 13 for holding an upper mask 11 and a lower printing frame 17 for holding a lower mask 15 and exposes an exposed material held between the upper and lower printing frames 13 and 17. The upper printing frame 13 is attached to a side plate 19 with a bearing 16 provided in a rear side part, and turned around a shaft A. The upper printing frame 13 is freely tuned around the shaft C of a bearing with respect to a turning cylinder 20. This turning cylinder 20 is freely turned around the shaft B of a bearing with respect to the side plate 19. When the cylinder 20 is driven to push out its rod, the upper printing frame 13 is turned around the shaft A with respect to the side plate 19 and great turning force can be obtained in the vicinity of a turning angleθt=0 deg. where the load of the upper printing frame 13 is greatly applied.
申请公布号 JPH09281713(A) 申请公布日期 1997.10.31
申请号 JP19960117141 申请日期 1996.04.16
申请人 NIPPON SEIKO KK 发明人 KAWASAKI SHINICHI;YAMADA YUTAKA;TAKESHITA MASAO;SUZUKI SATORU;KOIWAI HISAYOSHI;TAKENAKA TORU;TERADA YASUHISA
分类号 G03F7/20;H01L21/027;(IPC1-7):G03F7/20 主分类号 G03F7/20
代理机构 代理人
主权项
地址