| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized high-throughput conveyer for conveying semiconductor wafers, having a mechanism capable of carrying two semiconductor wafers at once over an immovable point position, without causing a jack knife phenomenon. SOLUTION: A pair of first arms 6a, 6b are coupled laterally symmetrically with two coaxially disposed driving shafts 3a, 3 capable of driving independently each other. A first pulley 9 is fixed to the shaft 3a of the first one arm 6a. A pair of second arms 8a, 8b are laterally symmetrically with the ends of the first arms 6a, 6b through rotatable bearings. A second pulley 10 is provided coaxially to the rotary shaft of the second arm 8b coupled with the first arm 6b and coupled with the first pulley 9 through a rotary power transmission medium e.g. belt 11. |
