PRODUCTION OF COLOR FILTER

摘要

PROBLEM TO BE SOLVED: To suppress and control the residue of a photosensitive resin remaining after development and to improve the production yield of a color filter. SOLUTION: In this production method, a black matrix is formed on a transparent supporting body, and then color pixels are formed by photolithography using a photosensitive resin in which red, green and blue pigments are dispersed on the supporting body. Before the photosensitive resin is applied, the surface to be coated is treated with ozone to control the contact angle with water to between >=12 deg. and <=40 deg. in the area where no pixel is formed. The ozone treatment is carried out in an atmosphere of >=1ppm ozone concn, at >=30 deg.C and for >=30sec. Further, the treatment is carried out in such an environment containing <=1000 particles per 1 cubic foot of particles having >=0.5μm particle size.