| 发明名称 |
NOVEL SILICON CARBIDE DUMMY WAFER. |
| 摘要 |
<p>The present invention relates to an unsiliconized or siliconized wafer consisting essentially of recrystallized silicon carbide, the wafer having a diameter of at least 150 mm and a thickness of between 0.5 and 2 mm, and having a porosity or free silicon content between 15 v/o and 43 v/o.</p> |
| 申请公布号 |
MX9605290(A) |
申请公布日期 |
1997.10.31 |
| 申请号 |
MX19960005290 |
申请日期 |
1996.02.28 |
| 申请人 |
SAINT-GOBAIN/NORTON INDUSTRIAL CERAMICS;CORPORATION |
发明人 |
CRAIG A. WILLKENS;NORMAND P. ARSENAULT |
| 分类号 |
C04B35/565;C04B35/573;C04B38/00;C04B41/87;C30B25/02;H01L21/02;(IPC1-7):C04B35/573;C30B31/10 |
主分类号 |
C04B35/565 |
| 代理机构 |
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