| 摘要 |
PROBLEM TO BE SOLVED: To prevent the deterioration of the breakdown strength of a capacity element whose capacity insulating film is made of ferroelectric material. SOLUTION: A capacity element is composed of a bottom electrode 12A, which is composed of ruthenium oxide film (conductive metal oxide layer), capacity insulating film composed of strontium titanate film (ferroelectric material) formed on the bottom electrode 12A and a top electrode 14A composed of ruthenium oxide film (conductive metal oxide layer) formed on the capacity insulating film. The oxidation reduction reaction on the interface between the capacity insulating trim 13 and the metal electrode, which becomes the cause for breakdown strength deterioration of the capacity element, is suppressed. |
