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发明名称
MANUFACTURE OF PROBER
摘要
申请公布号
JPH09281139(A)
申请公布日期
1997.10.31
申请号
JP19960263779
申请日期
1996.09.13
申请人
FURUKAWA ELECTRIC CO LTD:THE
发明人
ZAMA SATORU;SUZUKI TAKUYA;YUZAWA HITOSHI
分类号
G01R1/06;G01R1/073;G01R31/02;H01L21/66;(IPC1-7):G01R1/06
主分类号
G01R1/06
代理机构
代理人
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地址
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