发明名称 CONFOCAL OPTICAL APPARATUS AND HOLOGRAM EXPOSURE APPARATUS
摘要 <p>A confocal optical apparatus where reference light beam is directed diagonally to a hologram (3), the reference light is diffracted by the hologram (3), light beams equivalent to the light beams emitted from point light sources and outgoing from pinholes of a pinhole array (4) are produced, the light beams are projected onto an object, and object light, i.e., reflected light therefrom is focused at the pinholes. An incident light beam shaping means for shaping the cross section of the reference light beam into a generally circular shape is provided in the light path of the reference light beam.</p>
申请公布号 WO1997040412(P1) 申请公布日期 1997.10.30
申请号 JP1997001408 申请日期 1997.04.23
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