Wafer Träger

摘要

Disclosed is a dimensionally stable and static dissipative carrier for semiconductor wafers or magnetic storage disks that has exceptionally low particle generation characteristics. The carrier having opposing side walls and connecting walls, the side walls having ribs defining slots for axial arrangement of the disks or wafers. The sidewalls, ribs, and end walls are all integral and formed of injection molded polybutyl terephthalate (PBT) with 12 percent to 25 percent carbon fiber filler by weight. $$