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发明名称
Plasma etching method
摘要
申请公布号
EP0726596(A3)
申请公布日期
1997.10.29
申请号
EP19960101751
申请日期
1996.02.07
申请人
TOKYO ELECTRON LIMITED
发明人
INAZAWA, KOICHIRO;OKAMOTO, SHIN;HAYASHI, HISATAKA;MATSUSHITA, TAKAYA
分类号
H05H1/46;C23F4/00;C30B33/12;H01L21/302;H01L21/3065;H01L21/311;(IPC1-7):H01L21/311;H01L21/00
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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